Hmm, that's a crash I hoped I wouldn't see again, I suspect it has to do with creating new surfaces during an on_robot_placed event. I'll see to doing something about this, but in the meantime you should not place any factory buildings using robots, neither empty nor full ones. You should remove the buildings from your blueprints.
Just as a note, even if this crash weren't there, if you place down a blueprint of an active factory building, robots will only fill it with an empty factory building, never a used one. To place down a specific factory building using robots, you'll need to shift+click with that building in hand.